Packirisamy, Muthukumaran, Department of Mech. and Ind. Engineering, CONCAVE Research Center, Concordia University, Montreal, QC H3G2W1, Canada
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Canadian Acoustics Vol. 37 No. 3 (2009) - Proceedings of the Acoustics Week in Canada
Modeling electrostatic field in mems devices using artdticial springs in rayleigh-ritz method
Abstract PDF