Damping and quality factor optimization in MEMS microresonators

Authors

  • Gino Rinaldi Optical Microsystems Laboratory, CONCAVE Research Centre, Concordia University, Montreal, H3G 1M8, Canada
  • Muthukumaran Packirisamy Optical Microsystems Laboratory, CONCAVE Research Centre, Concordia University, Montreal, H3G 1M8, Canada
  • Ion Stiharu Optical Microsystems Laboratory, CONCAVE Research Centre, Concordia University, Montreal, H3G 1M8, Canada

Keywords:

Cantilever beams, Characterization, Damping, MEMS, Microsystems, Optimization, Microresonators, Quality factor optimization, Squeeze film effects

Abstract

An experimental investigation into the damping and quality factor optimization of resonating AFM microcantilevers has been presented. The effects of damping will affect the dynamic response of suspended microcantilever type devices, where damping in general may be due to structural or squeeze film effects. An important issue involved in these developments is to characterize the interaction of the resonating structure with the thin gas layer between the structure and its supporting substrate. The variable nature of the stiffness and damping is directly related to the geometry of the cutout. The cutout will affect both the stiffness and the damping of the microsystem, and the Q is directly proportional to the reduction in the damping of the microsystem. The resonance responses obtained show that the damping can be reduced significantly by the inclusion of a cutout in the microcantilever.

Published

2007-09-01

How to Cite

1.
Rinaldi G, Packirisamy M, Stiharu I. Damping and quality factor optimization in MEMS microresonators. Canadian Acoustics [Internet]. 2007Sep.1 [cited 2021May17];35(3):206-7. Available from: https://jcaa.caa-aca.ca/index.php/jcaa/article/view/1971

Issue

Section

Proceedings of the Acoustics Week in Canada