Damping and quality factor optimization in MEMS microresonators
Keywords:Cantilever beams, Characterization, Damping, MEMS, Microsystems, Optimization, Microresonators, Quality factor optimization, Squeeze film effects
AbstractAn experimental investigation into the damping and quality factor optimization of resonating AFM microcantilevers has been presented. The effects of damping will affect the dynamic response of suspended microcantilever type devices, where damping in general may be due to structural or squeeze film effects. An important issue involved in these developments is to characterize the interaction of the resonating structure with the thin gas layer between the structure and its supporting substrate. The variable nature of the stiffness and damping is directly related to the geometry of the cutout. The cutout will affect both the stiffness and the damping of the microsystem, and the Q is directly proportional to the reduction in the damping of the microsystem. The resonance responses obtained show that the damping can be reduced significantly by the inclusion of a cutout in the microcantilever.
How to Cite
Copyright on articles is held by the author(s). The corresponding author has the right to grant on behalf of all authors and does grant on behalf of all authors, a worldwide exclusive licence (or non-exclusive license for government employees) to the Publishers and its licensees in perpetuity, in all forms, formats and media (whether known now or created in the future)
i) to publish, reproduce, distribute, display and store the Contribution;
ii) to translate the Contribution into other languages, create adaptations, reprints, include within collections and create summaries, extracts and/or, abstracts of the Contribution;
iii) to exploit all subsidiary rights in the Contribution,
iv) to provide the inclusion of electronic links from the Contribution to third party material where-ever it may be located;
v) to licence any third party to do any or all of the above.