Dynamic behavior of micro structure in micro fluidic channel
Keywords:Atomic force microscopy, Fluids, Nanocantilevers, Dynamic behaviors, Dynamic motions, Finite element modeling, Fluid densities, Fluid excitation, Fluid flow, Fluid forces, Fluid pressures, Mesh module, Micro-cantilevers, Microfluidic channel, Multi-physics, Pressure load, Quality factors, Structural mechanics
AbstractA study was conducted to demonstrate the finite element modeling of micro cantilever excited by the fluid force. The micro cantilever in the existing model was excited by a fluid pressure force created by the fluid flow. COMSOL Multiphysics was used to develop the model involving the use of 3 different modules. The three modules used included micro fluidic modules, structural mechanics module, and deform mesh module. It was also observed that two different types of finite element modeling were developed with the same geometry for conducting the investigations. It was found that the density and viscosity of fluid controlled the quality factor for the fluid excitation to the micro cantilever. The fluid density was also responsible for pressure load that created the dynamic motion of the cantilever.
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