MEMS based acoustic pressure measurements

Authors

  • Gino Rinaldi CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada
  • Muthukumaran Packirisamy CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada
  • Ion Stiharu CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada

Keywords:

Acoustic variables measurement, Cost reduction, Electric power utilization, Microphones, Pressure measurement, Pressure sensors, Robustness (control systems), Dynamic pressure, Rotational velocities, Weight packaging

Abstract

The use of Micro-Electro-Mechanical-Systems (MEMS) microphones as pressure sensors for monitoring dynamic pressure variations of rotating axial fins is discussed. MEMS pressure sensors combine high sensitivity with small size/weight packaging that would enable in situ monitoring of pressure flows. MEMS pressure sensors satisfy several important criteria, namely, small size/weight, robustness, easily integrated with electronics, low power consumption and low cost. The pressure variations were measured using both an ultra-miniature electret microphone and MEMS microphone for comparison. A double fan configuration is also analyzed with an MEMS acoustic sensor mounted in between the two fans. The results are repeated for higher rotational velocities and frequencies with excellent signal-to-noise ratios obtained with the sensor.

Additional Files

Published

2007-09-01

How to Cite

1.
Rinaldi G, Packirisamy M, Stiharu I. MEMS based acoustic pressure measurements. Canadian Acoustics [Internet]. 2007 Sep. 1 [cited 2025 Feb. 13];35(3):208-9. Available from: https://jcaa.caa-aca.ca/index.php/jcaa/article/view/1972

Issue

Vol. 35 No. 3 (2007)

Section

Proceedings of the Acoustics Week in Canada

License

Author Licensing Addendum

This Licensing Addendum ("Addendum") is entered into between the undersigned Author(s) and Canadian Acoustics journal published by the Canadian Acoustical Association (hereinafter referred to as the "Publisher"). The Author(s) and the Publisher agree as follows:

  1. Retained Rights: The Author(s) retain(s) the following rights:

    • The right to reproduce, distribute, and publicly display the Work on the Author's personal website or the website of the Author's institution.
    • The right to use the Work in the Author's teaching activities and presentations.
    • The right to include the Work in a compilation for the Author's personal use, not for sale.

  2. Grant of License: The Author(s) grant(s) to the Publisher a worldwide exclusive license to publish, reproduce, distribute, and display the Work in Canadian Acoustics and any other formats and media deemed appropriate by the Publisher.

  3. Attribution: The Publisher agrees to include proper attribution to the Author(s) in all publications and reproductions of the Work.

  4. No Conflict: This Addendum is intended to be in harmony with, and not in conflict with, the terms and conditions of the original agreement entered into between the Author(s) and the Publisher.

  5. Copyright Clause: Copyright on articles is held by the Author(s). The corresponding Author has the right to grant on behalf of all Authors and does grant on behalf of all Authors, a worldwide exclusive license to the Publisher and its licensees in perpetuity, in all forms, formats, and media (whether known now or created in the future), including but not limited to the rights to publish, reproduce, distribute, display, store, translate, create adaptations, reprints, include within collections, and create summaries, extracts, and/or abstracts of the Contribution.