MEMS based acoustic pressure measurements

Authors

  • Gino Rinaldi CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada
  • Muthukumaran Packirisamy CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada
  • Ion Stiharu CONCAVE Research Center, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, H3G 1M8, Canada

Keywords:

Acoustic variables measurement, Cost reduction, Electric power utilization, Microphones, Pressure measurement, Pressure sensors, Robustness (control systems), Dynamic pressure, Rotational velocities, Weight packaging

Abstract

The use of Micro-Electro-Mechanical-Systems (MEMS) microphones as pressure sensors for monitoring dynamic pressure variations of rotating axial fins is discussed. MEMS pressure sensors combine high sensitivity with small size/weight packaging that would enable in situ monitoring of pressure flows. MEMS pressure sensors satisfy several important criteria, namely, small size/weight, robustness, easily integrated with electronics, low power consumption and low cost. The pressure variations were measured using both an ultra-miniature electret microphone and MEMS microphone for comparison. A double fan configuration is also analyzed with an MEMS acoustic sensor mounted in between the two fans. The results are repeated for higher rotational velocities and frequencies with excellent signal-to-noise ratios obtained with the sensor.

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Published

2007-09-01

How to Cite

1.
Rinaldi G, Packirisamy M, Stiharu I. MEMS based acoustic pressure measurements. Canadian Acoustics [Internet]. 2007 Sep. 1 [cited 2021 Sep. 27];35(3):208-9. Available from: https://jcaa.caa-aca.ca/index.php/jcaa/article/view/1972

Issue

Section

Proceedings of the Acoustics Week in Canada