MEMS based acoustic pressure measurements

Gino Rinaldi, Muthukumaran Packirisamy, Ion Stiharu


The use of Micro-Electro-Mechanical-Systems (MEMS) microphones as pressure sensors for monitoring dynamic pressure variations of rotating axial fins is discussed. MEMS pressure sensors combine high sensitivity with small size/weight packaging that would enable in situ monitoring of pressure flows. MEMS pressure sensors satisfy several important criteria, namely, small size/weight, robustness, easily integrated with electronics, low power consumption and low cost. The pressure variations were measured using both an ultra-miniature electret microphone and MEMS microphone for comparison. A double fan configuration is also analyzed with an MEMS acoustic sensor mounted in between the two fans. The results are repeated for higher rotational velocities and frequencies with excellent signal-to-noise ratios obtained with the sensor.


Acoustic variables measurement; Cost reduction; Electric power utilization; Microphones; Pressure measurement; Pressure sensors; Robustness (control systems); Dynamic pressure; Rotational velocities; Weight packaging

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